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Feijoo, P.C. ; Pampillón Arce, María Ángela ; San Andres Serrano, Enrique ; Fierro, J.L.G. | Elsevier Science SA | 2015-10-30In this work we use the high pressure sputtering technique to deposit the high permittivity dielectric gadolinium scandate on silicon substrates. This nonconventional deposition technique prevents substrate damage and allows for growth of ternar[...]texto impreso
Lucía Mulas, María Luisa ; Prado Millán, Álvaro del ; San Andres Serrano, Enrique ; Feijoo, P.C. ; Toledano-Luque, M. | American Institute of Physics | 2010-04-15Scandium oxide (ScO(x)) thin layers are deposited by high-pressure sputtering (HPS) for physical and electrical characterization. Different substrates are used for comparison of several ScO(x)/Si interfaces. These substrates are chemical silicon[...]
