Título:
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Scanning electron acoustic microscopy of electronic materials
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Autores:
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Piqueras de Noriega, Javier
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Tipo de documento:
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texto impreso
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Editorial:
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Elsevier Science SA, 1994-05
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Palabras clave:
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Estado = Publicado
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Materia = Ciencias: Física: Física de materiales
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Tipo = Artículo
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Resumen:
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Some scanning electron acoustic microscopy (SEAM) applications to the characterization of electronic materials are discussed. The specific problem of the observation of dislocations and dislocation-related features in GaAs is treated as an example of SEAM capability and limitations in the characterization of III-V compounds. However, SEAM is applied to study high T(c) superconductors. It is shown that evolution of the SEAM signal with temperature can provide information about structural changes above the critical temperature.
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