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Título:
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Study of thermal treated a-Si implanted with Er and O ions
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Autores:
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Plugaru, R. ;
Méndez Martín, Bianchi ;
Piqueras de Noriega, Javier ;
Tate, T.J.
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Tipo de documento:
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texto impreso
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Editorial:
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Institute of Physics, 2002-12-16
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Dimensiones:
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application/pdf
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Nota general:
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info:eu-repo/semantics/openAccess
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Idiomas:
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Palabras clave:
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Estado = Publicado
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Materia = Ciencias: Física: Física de materiales
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Tipo = Artículo
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Resumen:
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Visible luminescence of amorphous silicon layers either implanted with Er or co-implanted with Er and O and subsequently annealed in nitrogen has been investigated by cathodoluminescence (CL) in a scanning electron microscope. Co-implanted samples show a more intense luminescence, which is revealed by annealing at lower temperatures than the samples implanted only with erbium. Thermal treatments cause the formation of erbium oxide as well as Er-Si complexes or precipitates. Violet-blue luminescence has been found from CL images and spectra to be related to Er-Si precipitates. Emission in the green-red range is attributed to oxide species.
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En línea:
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https://eprints.ucm.es/id/eprint/24419/1/MendezBianchi33.pdf
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