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Gourbilleau, F. ; Ternon, C. ; Maestre Varea, David ; Palais, O. ; Dufour, C. | American Institute of Physics | 2009-07-01Si-rich-SiO_2(SRSO)/SiO_2 multilayers (MLs) have been grown by reactive magnetron sputtering. The presence of silicon nanoclusters (Si-ncls) within the SRSO sublayer and annealing temperature influence optical absorption as well as photoluminesc[...]
