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Título:
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Optical spectroscopic study of the growth dynamicsof radio-frequency-sputtered YBa2Cu3O(7-x) thin films
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Autores:
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Mártil de la Plaza, Ignacio ;
González Díaz, Germán ;
Hernández Rojas, J. L. ;
Lucía Mulas, María Luisa ;
Sánchez Quesada, Francisco ;
Santamaría Sánchez-Barriga, Jacobo
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Tipo de documento:
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texto impreso
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Editorial:
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Amer Inst Physics, 1992-07-13
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Dimensiones:
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application/pdf
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Nota general:
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info:eu-repo/semantics/openAccess
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Idiomas:
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Palabras clave:
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Estado = Publicado
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Materia = Ciencias: Física: Electricidad
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Materia = Ciencias: Física: Electrónica
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Tipo = Artículo
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Resumen:
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An optical spectroscopic study of the plasma produced during rf sputtering of an YBa2Cu3O7-x target was performed to analyze two basic properties of the deposition process: resputtering effects and oxidation mechanisms. Strong emissions of all the species above a value of the target voltage were found. These observations are associated to a strong secondary electron emission of the target which originates a negative self-bias of the substrate and a subsequent resputtering by argon cations. The addition of different amounts of oxygen to the discharge reveals that preoxidation in the gas phase may decrease the oxygen content in the films: the oxidation of the films is dominated by atomic oxygen.
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En línea:
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https://eprints.ucm.es/id/eprint/27131/1/Martil%2C118libre.pdf
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