Información del autor
Autor Martínez, F.L. |
Documentos disponibles escritos por este autor (1)
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texto impreso
Mártil de la Plaza, Ignacio ; González Díaz, Germán ; Martínez, F.L. ; Selle, B. ; Sieber, I. | Elsevier Science BV | 1998-05We have analyzed the effects of rapid thermal annealing on the composition and on the bonding and optical properties of amorphous hydrogenated silicon nitride (a-Si-x:H) thin films deposited at room temperature by the electron cyclotron resonanc[...]