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Minority carrier diffusion length in AlGaN: A combined electron beam induced current and transmission microscopy

Cremades Rodríguez, Ana Isabel ; Albrecht, M. ; Voigt, A. ; Krinke, J. ; Dimitrov, R. ; Ambacher, O. ; Stutzmann, M. | Trans Tech-Scitec Publications LDT | 1998

Combined electron beam induced current and transmission electron microscopy measurements have been performed on both undoped and Si-doped AlGaN epitaxial films with aluminium contents x ranging from x=0 to x=0.79. TEM analysis shows the distribu[...]

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