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Título:
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Optical characterization of surfaces by robust reflectance determination based on air-gap interference
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Autores:
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Quiroga Mellado, Juan Antonio ;
Martínez Antón, Juan Carlos ;
González Moreno, Ricardo
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Tipo de documento:
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texto impreso
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Editorial:
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Elsevier Science B. V., 2004-11-15
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Dimensiones:
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application/pdf
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Nota general:
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info:eu-repo/semantics/openAccess
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Idiomas:
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Palabras clave:
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Estado = Publicado
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Materia = Ciencias: Física: Optica
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Tipo = Artículo
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Resumen:
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In this work we present an optical tool for characterizing the reflectance and polarimetric properties of surfaces. It uses only the image of the interference fringe pattern produced in a thin air-gap between the surface of interest and a glass surface acting as a reference. From only the contrast of the fringe pattern captured with a CCD we may obtain the reflectance of the surface, no need of measuring a reference beam. By taking two images with polarized light, we may get then the polarized reflectance R_p and R_s, but also the ellipsometric magnitude ?, simply as a phase shift between fringes in p and s polarization. A sample of silicon with a thin layer of thermally grown silica is used to test the method.
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En línea:
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https://eprints.ucm.es/id/eprint/23092/1/QuirogaJA57.pdf
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