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Título:
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High quality factor indium oxide mechanical microresonators
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Autores:
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Bartolomé Vílchez, Javier ;
Cremades Rodríguez, Ana Isabel ;
Piqueras de Noriega, Javier
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Tipo de documento:
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texto impreso
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Editorial:
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Amer Inst Physics, 2015-11-09
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Dimensiones:
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application/pdf
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Nota general:
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info:eu-repo/semantics/openAccess
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Idiomas:
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Palabras clave:
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Estado = Publicado
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Materia = Ciencias: Física: Física de materiales
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Materia = Ciencias: Física: Física del estado sólido
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Tipo = Artículo
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Resumen:
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The mechanical resonance behavior of as-grown In_2O_3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than (10)^5 and minimum detectable forces of the order of (10)^(16) N/Hz^(1/2) demonstrate their potential as mechanical microresonators for real applications. Measurements at low- vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure.
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En línea:
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https://eprints.ucm.es/35241/1/CremadesAna67%20libre.pdf
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