texto impreso

Micro-opto-electro-mechanical device based on flexible beta-Ga_2O_3 micro-lamellas

Peres, Marco ; Fernandes, A.J.S. ; Oliveira, F.J. ; Alves, L.C. ; Alves, E. ; Monteiro, T.S. ; Cardoso, S. ; Alonso Orts, Manuel ; Nogales Díaz, Emilio ; Méndez Martín, Bianchi | Electrochemical Society | 2019-06-24

A thermal actuator based on thin flexible lamellas of Ga_2O_3 was designed in order to demonstrate the potential of this semiconductor for micro-opto-electro-mechanical applications (MOEMs). The working principle of these devices is based on the[...]

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